1,3-Hexafluorobutadiene CAS-NO: 685-63-2

价格	￥10000.00/kg
起订量	≥20
所在地	安徽滁州	可售量 10000kg

联系人：宋永彬

企业已验证

톖ꔱꔱ

手机扫码快速拨号

免费会员第4年

全椒亚格泰电子新材料科技有限公司

联系人：宋永彬 (联系时,请说明是在全球塑胶网上看到的)

联系电话：

手机号码：톖ꔱꔱ

公司官网： www.argosun.com.cn

所在地区：安徽省滁州市

主营产品：乙硅烷,

进入店铺

产品分类

最新产品

一甲基硅烷

￥0元
Trisilylamine-三甲硅烷基胺（TSA）CAS 13862-16-3

￥10000元
氘气 D2

￥8000元
六氨氯化镁

￥200元
三甲基硅烷（C3H10Si）

￥10000元

商品详情联系方式

进入手机版

基本参数

纯度	99.995%	规格	47L
品牌	Argotech	CAS	685-63-2
保质期	24个月	产地	安徽

Technical specification

1,3-Hexafluorobutadiene

CAS-NO: 685-63-2
UN No: 3160

Chemical Formula: C4F6

Appearance:

Colorless, liquefied gas, tasteless.

Type:

Electronic purity 4N

Purpose:
Electron gas
Applied to microelectronics manufacturing 45 ~ 25nm standard thin film plasma chemical etching process,
for slotting and opening.
It is possible to etch high aspect ratio, high anisotropy and smooth vertical wall structure.
Ozone safety (GWP 0.1).
Attributes:
Hexafluoro-1, 3-butadiene is a colorless, liquefied gas, tasteless, well soluble in organic
solvents and slightly soluble in water.
It is a stable gas under normal conditions and reacts with chlorine and bromine at higher
temperatures.
Under high pressure and temperature, hexafluorobutadiene dimer and trimer can be
polymerized.
Chemical composition of product:

Chemistry. Composition	Directory	Unit of measurement
Hexafluoro-1, 3-butadiene	99.995	%
Air, Max.	35	ppm
C-C4F6, max	50	ppm
Carbon dioxide, maximum	15	ppm
Water, Max.	2.2	ppm
Fluoride ion, maximum.	0.7	ppm

Attributes (reference data):

Molecular weight	162	Gram/mole
Density at 20 ℃ (liquid phase)	1434	Kg/m3
Melting point	-162	0C
Boiling point	6	0C
Saturated vapor pressure at 20 ℃	178.8	KPa
Relative density, gas (air = 1)	5.6
Relative density, liquid	1.4